#  Thermoelectric Chillers for Semiconductor Metrology & Inspection Systems

The complex semiconductor fabrication requires multiple tests between processing steps to inspect defects as well as measure dimensional properties. Automated optical inspection systems require a thermal solution to dissipate waste heat and keep imaging sensors at a very precise temperature control well below ambient. Thermoelectric-based recirculating chillers provide the temperature stabilization, low pulsation and high reliability needed.

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