OEM Perspectives: Recirculating Chillers for Semiconductor Metrology & Inspection Systems
Introduction
Semiconductor metrology is critical in the semiconductor fabrication process. The complex nature of semiconductor fabrication now requires multiple test stages in between processing steps. Thin film semiconductor wafers are tested using several techniques including ellipsometry and reflectometry. Sophisticated optical equipment is used to inspect for defects as well as for accurate dimensional measurements. Manufacturers of optical inspection systems must integrate a thermal solution for temperature stabilization of optical components.