Thermoelectric Chillers for Semiconductor Metrology & Inspection Systems
Introduction
The implementation of automated metrology systems has been a key to achieving cost effective semiconductor fabrication. The complex nature of semiconductor fabrication requires multiple tests between processing steps to inspect defects as well as measure dimensional properties including thickness, refractive index, resistivity and stress of the thin films. Because thermal noise can impact the image resolution of sensitive optical components in automated metrology systems, a thermal management system is required.