Easy-to-use, dependable chillers offer application-specific configurability for precise temperature control of industrial and analytical equipment…
Environmentally friendly thermoelectric recirculating chiller with zero GWP ensures temperature stability and high-resolution images…
To meet demands of precise temperature control in many laboratory and industrial applications, Laird Thermal Systems has developed the Nextreme™ NRC400 Performance Chiller. The NRC400 is a next generation benchtop recirculating chiller that utilizes advanced thermoelectric coolers and high-performance heat exchangers to deliver 400 watts of cooling power and a temperature stability of ±0.05°C.
Semiconductor metrology inspection systems require a thermal management solution for maximum operation and imaging performance. Thermoelectric-based recirculating chillers provide the temperature stabilization, low pulsation and high reliability needed.
Digital microscopes utilizing CCD or CMOS sensor-based cameras need to maintain very precise temperature control to provide high resolution images and ensure long-life operation of the device. Delivering a cooling capacity of 400 Watts and a temperature stability of ±0.05°C, the NRC400 Recirculating Chiller exceeds requirements for microscopy imaging applications.
Temperature stabilization is key to maintaining peak performance for any industrial laser system. Thermoelectric-based chillers are becoming popular for cooling lower power lasers due to their high reliability, precise temperature control and low maintenance requirements.
The increasing demand in many end markets for advanced manufacturing systems that are able to increase production and cut costs have positioned laser systems as an important fabrication tool. High-power industrial lasers can generate outputs in excess of 10,000 W when processing thick metals, generating a significant amount of heat not only in the targeted surface but also in the sensitive optics inside the laser. The temperature of these optics needs to be maintained to achieve peak performance for the tool.
Semiconductor metrology is critical in the semiconductor fabrication process. The complex nature of semiconductor fabrication now requires multiple test stages in between processing steps. Thin film semiconductor wafers are tested using several techniques including ellipsometry and reflectometry. Sophisticated optical equipment is used to inspect for defects as well as for accurate dimensional measurements. Manufacturers of optical inspection systems must integrate a thermal solution for temperature stabilization of optical components.
The implementation of automated metrology systems has been a key to achieving cost effective semiconductor fabrication. The complex nature of semiconductor fabrication requires multiple tests between processing steps to inspect defects as well as measure dimensional properties including thickness, refractive index, resistivity and stress of the thin films. Because thermal noise can impact the image resolution of sensitive optical components in automated metrology systems, a thermal management system is required.