Thermolectric Chillers for Semiconductor Metrology & Inspection Systems

Semiconductor metrology inspection systems require a thermal management solution for maximum operation and imaging performance. Thermoelectric-based recirculating chillers provide the temperature stabilization, low pulsation and high reliability needed.

 

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Presentation

Applications

Semiconductor Fabrication Equipment

Product Section

Liquid Cooling Systems

Product Series

Nextreme™ Series, Recirculating Chillers