Introduction

Semiconductor metrology is critical in the semiconductor fabrication process. The complex nature of semiconductor fabrication now requires multiple test stages in between processing steps. Thin film semiconductor wafers are tested using several techniques including ellipsometry and reflectometry. Sophisticated optical equipment is used to inspect for defects as well as for accurate dimensional measurements. Manufacturers of optical inspection systems must integrate a thermal solution for temperature stabilization of optical components.

Introduction

As power densities and thermal loads continue to increase in crowded electronic systems, and specific analytical and diagnostic testing processes demand more temperature stabilization for improved accuracy and results, more equipment designers, R&D labs and diagnostic laboratories are turning to liquid cooling solutions for better thermal management. Optimal cooling fluids improve accuracy of results, improve equipment performance, minimize downtime, reduce maintenance costs, ensure safety and can help meet environmental compliance.

Introduction

Rheometers are scientific instruments used for studying the stress-strain relationship of polymers, fluids, and other soft materials to understand their flow/deformation properties. Rheometers are applied in a wide range of applications, such as in the development of new materials, quality control, and process optimization. Any rheometer that operates at elevated temperatures or measures temperature-dependent material properties requires a cooling system to maintain a precise temperature during testing.

Introduction

At Laird Thermal Systems, we are committed to eco-friendly solutions for temperature stabilization for demanding applications across global medical, analytical, industrial, transportation, and telecommunications markets.

Older compressor-based systems often use high global-warming potential (GWP) HFC refrigerants like R134a and R404A. New industry requirements are moving away from the use of such refrigerants due to their environmental impact. New government restrictions on traditional and natural refrigerants are central to compressor-based systems.